ASCII American Standard Code for Information InterchangeBFGS Broyden-Fletcher-Goldfarb-Shanno
BPFL Berkeley Process Flow Language
CAD Computer-Aided Design
CAD Computer-Aided Manufacturing
CFI CAD Framework Initiative
CIM Computer-Integrated Manufacturing
CMOS Complementary MOS
CMP Chemical Mechanical Polishing
CPU Central Processing Unit
CVD Chemical Vapor Deposition
DoE Design of Experiments
ECAD Electronic CAD
EVE Evaluable Entity
EVI Evaluation Instance
GUI Graphical User Interface
HDX Hierarchical Data Exchange
IC Integrated Circuit
LAT Large-Angle Tilt
LDD Lightly Doped Drain
LISP List Processing
LM Levenberg-Marquardt
LOCOS Local Oxidation of Silicon
MOS Metal-Oxide-Semiconductor
NFS Network File System
PAI PIF Application Interface
PAL PIF Application Layer
PBFM PIF Binary File Manager
PED PIF Editor
PFR Process Flow Representation
PIF Profile Interchange Format
PIL PIF Interface Layer
PLB PIF Logical Binary File
PVD Physical Vapor Deposition
RIE Reactive Ion Etching
RPC Remote Procedure Call
RSM Response Surface Model
SFC Simulation Flow Control
SIMS Secondary Ion Mass Spectrometry
SPR Semiconductor Process Representation
SRP Spreading Resistance Profiling
STI System Tool Interface
SVG Simple Vector Graphics
SWR Semiconductor Wafer Representation
TAC Tool Abstraction Concept
TCAD Technology CAD
TIF Technology Interchange Format
VISTA Vienna Integrated System for TCAD Applications
VLISP Vienna LISP
VLSI Very Large Scale Integration
VOS Vienna Operating System
VUI Vienna User Interface
WWW World Wide Web