Terminology

1-D simulation:

One-dimensional simulation. In TCAD, refers to the numerical analysis of semiconductor fabrication processes and devices with all physical quantities assumed to be constant in all directions except for the vertical direction perpendicular to the wafer surface.

2-D simulation:

Two-dimensional simulation. Inquiry into the nature and causes of the behavior of a semiconductor wafer (during process simulation) or a semiconductor device (during device simulation) with all quantities assumed to be constant in a direction parallel to the wafer surface. The cross-section under scrutiny is a plane perpendicular to the wafer surface, usually cutting through the active area and the electrodes of the device.

1-D/2-D simulation:

Combines a set of one-dimensional (and two-dimensional) simulations to build a two-dimensional model.

Chip:

A minute square of thin semiconductor material cut off from a processed wafer. Most valuable when carrying an integrated circuit.

Device:

Semiconductor device that is the basic component of an integrated circuit. Most of the times, a transistor.

Equipment:

Piece of equipment found in semiconductor fabs used to apply treatments onto wafers.

Fab:

Fabrication unit for manufacturing semiconductor devices. Comprises a clean room and numerous pieces of equipment; very expensive (new ones start at one billion dollar (US)).

Flow:

Sequence of processing or simulation statements to be carried out one after the other to fabricate or simulate a device.

Integrated Circuit:

Electronic circuitry realized on a single semiconductor chip. Usually comprises a lot of transistors (up to several million), but rather few inductances. Most prominent examples are microprocessors and memory components.

LISP:

Interpreting programming language primarily used in artificial intelligence and CAD. Its basic data types are lists, hence the name, and atoms, which are not lists.

Threshold Voltage:

Characteristic voltage applied to the gate electrode of a MOS transistor that marks the transition from an off state to an on state. Definitions for real devices vary from company to company. Internally, it indicates the onset of strong inversion in the device [Wol95a].

Tool:

Simulator or other computer programm that serves a similar purpose for the ends of the user as does, e.g., a hammer for a carpenter. More specifically, a process, device, capacitance, or circuit simulator.

Wafer:

Piece of semiconductor material that is gradually transformed into an electronic device during fabrication.

Widget:

Building block of graphical user interfaces.

Yield:

Ratio of chips accepted over chips started. The higher, the better, usually around 90% (for memory products) to 60% (for microprocessors).