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Terminology
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PhD Thesis Christoph Pichler
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List of Figures
List of Tables
Examples of project resources.
VISTA/SFC
VLISP modules.
Selected VLISP data types.
Original PIF specification vs.
VISTA/SFC
PIF wafer state convention.
Template substitution expressions.
Examples of VLSI fabrication processes.
Simulation tools and processes for process simulation.
Basic fabrication processes.
Summary of color-coding for state display.
Examples of available tool output data types.
Summary of basic
EVE
functionality
Summary of design types provided by the DoE module.
Summary of
EVE
commands for task-level applications.
CMOS process sequence
Process parameters for NMOS device
Optimum pocket-implant parameters
Auxiliary PIF tools.
Christoph Pichler
Thu Mar 13 14:30:47 MET 1997