In addition to wafer data, tools may generate any number of data items of arbitrary types. These data are made available to the controlling environment by registering them after termination of the tool run, specifying a name and a type. Types either belong to a group of predefined, standard data types (Table 7.1), or are defined by the user. For instance, a threshold type would denote a data item that contains the extracted threshold voltage after a device simulation step. Type specifiers are used to search for required input data during run-time of simulation, to select appropriate post-processing and display tools,
Table 7.1:
Examples of available tool output data types.