5.4.5 Optimization Using Electrical Parameters

The second subtask from Figure 5.14 can be considered as the inverse modeling step itself. The start point for the optimization is the results of the profile extraction.

In Figure 5.14 the flow of the inverse modeling step is shown. The model evaluated in the optimization loop requests the calculation of the output and transfer curves of three transistors with different gate lengths (0.18, 0.25, and $0.50 \ {\rm\mu m}$) and the capacity versus voltage characteristics of a large $300 \times 300 \ {\rm\mu m}$ device.

For the output and transfer characteristics the device for the specific gate length is generated and two device simulation, one with fixed drain voltages (1, 1.5, and $2 \ {\rm V}$) and one with fixed gate voltages (0.05, and $1.5 \ {\rm V}$), are performed.

For each gate length a separate analytical device is generated and the transfer, output, and capacity voltage characteristics are simulated using MINIMOS-NT. The results of all comparisons build the residuum vector which is returned to the optimizer.