The second subtask from Figure 5.14 can be considered as the inverse modeling step itself. The start point for the optimization is the results of the profile extraction.
In Figure 5.14 the flow of the inverse modeling step is
shown.
The model evaluated in the optimization loop requests the calculation
of the output and transfer curves of three transistors with different
gate lengths (0.18, 0.25, and
)
and the
capacity versus voltage characteristics of a large
device.
For the output and transfer characteristics the device for the
specific gate length is generated and two device simulation, one with
fixed drain voltages (1, 1.5, and )
and one with
fixed gate voltages (0.05, and
), are performed.
For each gate length a separate analytical device is generated and the transfer, output, and capacity voltage characteristics are simulated using MINIMOS-NT. The results of all comparisons build the residuum vector which is returned to the optimizer.