Starting from an initial guess for the 25 parameters listed in
Table 5.4, the optimization was performed.
A comparison of the donor doping profile of the simulated device and
the analytical profile in the source region is shown in
Figure 5.16 and Figure 5.17.
The modeled donor profile consists of two Pearson/Error-function
distributions (S/D 1 and S/D 2). This profile has a good coincidence
with the results of the process simulation. The peak located
away from the top of the device which is caused by coupled
diffusion is not modeled by the resulting profile, but it is negligible for the
electrical characterization.
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