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Curriculum Vitae



July 1999 - August 1999

    Visiting Researcher at LSI Logic, Santa Clara, CA, USA, working on integration of reactor and feature scale topography simulation for PVD and CVD processes.
June 1998 - August1998     Visiting Researcher at LSI Logic, Santa Clara, CA, USA, working on three-dimensional modeling and simulation of high pressure CVD processes.
since December 1996     Vienna University of Technology, Austria. Enrolled in a full Ph.D. program at the Institute for Microelectronics under the supervision of Prof. Siegfried Selberherr.
1994 - 1996     University of Leoben, Austria, master's degree, ``Diplomingenieur'', in Materials Science (with honors). Awarded with Rektor Platzer Ring.
July - September 1994     Internship at Siemens Semiconductors, Munich, Germany.
1989 - 1994     University of Leoben, Austria, ``1. Diplomprüfung'' in Materials Science.
1980 - 1988     High school, Innsbruck, Austria.
1976 - 1980     Primary school, Lans, Austria.
August 27 1970     Born in Innsbruck, Austria.

     
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W. Pyka: Feature Scale Modeling for Etching and Deposition Processes in Semiconductor Manufacturing