Literatur

1

A.V. Aho, R. Sethi, and J.D. Ullman. Compilers. Addison-Wesley, 1986.

2

St. Augarten. Bit by Bit. Tickrer and Fields, New York, 1984.

3

Autodesk AG. AUTOCAD Release 11 Reference Manual, 1990. Publication AC11RM.E1.

4

V. Axelrad, Y. Granik, and R. Jewell. CAESAR: The Virtual IC Factory as an Integrated TCAD User Environment. In Fasching et al. [13], pages 293-307.

5

R.E. Bank. PLTMG: A Software Package for Solving Elliptic Partial Differential Equations, volume 15 of Frontiers in Applied Mathematics. SIAM, Philadelphia, 1994. Users' Guide 7.0.

6

T.J. Barnes, D. Harrison, A.R. Newton, and R.L. Spickelmier. Electronic CAD Frameworks. Kluwer, 1992.

7

D.M. Betz. XLISP: An Object-Oriented Lisp, Version 2.1, 1989.

8

S.G. Duvall. An Interchange Format for Process and Device Simulation. IEEE Trans.Computer-Aided Design, 7(7):741-754, 1988.

9

Electronics Research Laboratory, University of California, Berkeley. SAMPLE 1.8a User Guide, 1991.

10

F. Fasching. The Viennese Integrated System for Technology CAD Applications-Data Level Design and Implementation. Dissertation, Technische Universität Wien, 1994.

11

F. Fasching, C. Fischer, S. Halama, H. Pimingstorfer, H. Read, S. Selberherr, H. Stippel, W. Tuppa, P. Verhas, and K. Wimmer. A New Open Technology CAD System. In M. Ilegems and M. Dutoit, editors, 21st European Solid State Device Research Conference - ESSDERC'91, volume 15 of Microelectr.Eng., pages 217-220, Montreux, Switzerland, 1991. Elsevier.

12

F. Fasching, C. Fischer, S. Selberherr, H. Stippel, W. Tuppa, and H. Read. A PIF Implementation for TCAD Purposes. In W. Fichtner and D. Aemmer, editors, Simulation of Semiconductor Devices and Processes, volume 4, pages 477-482, Konstanz, 1991. Hartung-Gorre.

13

F. Fasching, S. Halama, and S. Selberherr, editors. Technology CAD Systems. Springer, 1993.

14

C. Fischer, P. Habas, O. Heinreichsberger, H. Kosina, Ph. Lindorfer, P. Pichler, H. Pötzl, C. Sala, A. Schütz, S. Selberherr, M. Stiftinger, and M. Thurner. MINIMOS 6.0 User's Guide. Institute for Microelectronics, Technical University Vienna, March 1994.

15

J.D. Foley, A. van Dam, S.K. Feiner, and J.F. Hughes. Computer Graphics. Addison-Wesley, second edition, 1990.

16

A.F. Franz and G.A. Franz. BAMBI--A Design Model for Power MOSFET's. IEEE Trans.Computer-Aided Design, CAD-4(3):177-189, 1985.

17

A.F. Franz, G.A. Franz, and S. Selberherr. BAMBI - A Design Model for Power MOSFET's. In Proc.ICCAD, pages 179-181, 1984.

18

P. Habas, O. Heinreichsberger, Ph. Lindorfer, P. Pichler, H. Pötzl, A. Schütz, S. Selberherr, M. Stiftinger, and M. Thurner. MINIMOS 5 User's Guide. Institut für Mikroelektronik, Technische Universität Wien, Austria, March 1990.

19

S. Halama. The Viennese Integrated System for Technology CAD Applications-Architecture and Critical Software Components. Dissertation, Technische Universität Wien, 1994.

20

C.P. Ho, J.D. Plummer, S.E. Hansen, and R.W. Dutton. VLSI Process Modeling--SUPREM III. IEEE Trans.Electron Devices, ED-30(11):1438-1453, 1983.

21

G. Hobler, P. Pichler, and K. Wimmer. PROMIS 1.5 User Guide. Institut für Mikroelektronik, Technische Universität Wien, 1991.

22

P.J. Hopper and P.A. Blakey. The MASTER Framework. In Fasching et al. [13], pages 275-292.

23

J.A.Payne. Introduction to Simulation. McGraw-Hill, 1982.

24

F.P. Brooks Jr. The Mythical Man-Month. Addison-Wesley, 1982.

25

S. Krüger. Simulation - Grundlagen, Techniken, Anwendungen. Walter de Gruyter, Berlin, 1975.

26

E. Leitner, W. Bohmayr, P. Fleischmann, E. Strasser, and S. Selberherr. 3D TCAD at TU Vienna. In J. Lorenz, editor, 3-Dimensional Process Simulation, pages 136-161. Springer, 1995.

27

R. Mlekus, Ch. Ledl, E. Strasser, and S. Selberherr. Polygonal Geometry Reconstruction after Cellular Etching or Deposition Simulation. In Ryssel and Pichler [36], pages 50-53.

28

R. Morean. The Computer Comes of Age. MIT-Press, Cambridge, 1984.

29

T. O'Reilly. X Toolkit Intrinsics Reference Manual, volume 5 of The X Window System Series. O'Reilly & Associates, first edition, 1990.

30

G. Pahl. Konstruieren mit 3D-CAD Systemen. Springer, Berlin, 1990.

31

Ch. Pichler and S. Selberherr. Process Flow Representation within the VISTA Framework. In S. Selberherr, H. Stippel, and E. Strasser, editors, Simulation of Semiconductor Devices and Processes, volume 5, pages 25-28. Springer, 1993.

32

H. Pimingstorfer. Integration und Anwendung von Simulatoren in der CMOS-Entwicklung. Dissertation, Technische Universität Wien, 1993.

33

F.P. Preparata and M.I. Shamos. Computational Geometry. Springer, 1985.

34

G. Rieger, S. Halama, and S. Selberherr. A Programmable Tool for Interactive Wafer-State Level Data Processing. In Ryssel and Pichler [36], pages 58-61.

35

M. Rottinger, T. Simlinger, and S. Selberherr. Two-Dimensional Transient Simulation of Charge-Coupled Devices Using MINIMOS NT. In Ryssel and Pichler [36], pages 440-443.

36

H. Ryssel and P. Pichler, editors. Simulation of Semiconductor Devices and Processes, volume 6. Springer, 1995.

37

G. Schrom, D. Liu, Ch. Pichler, Ch. Svensson, and S. Selberherr. Analysis of Ultra-Low-Power CMOS with Process and Device Simulation. In C. Hill and P. Ashburn, editors, 24th European Solid State Device Research Conference - ESSDERC'94, pages 679-682, Gif-sur-Yvette Cedex, France, 1994. Editions Frontieres.

38

R. Sedgewick. Algorithms in C. Addison-Wesley, 1990.

39

T. Simlinger, H. Kosina, M. Rottinger, and S. Selberherr. MINIMOS-NT: A Generic Simulator for Complex Semiconductor Devices. In H.C. de Graaff and H. van Kranenburg, editors, ESSDERC'95 - 25th European Solid State Device Research Conference, pages 83-86, Gif-sur-Yvette Cedex, France, 1995. Editions Frontieres.

40

R. Stallman. GNU Emacs Manual, October 1986.

41

E. Strasser and S. Selberherr. Algorithms and Models for Cellular Based Topography Simulation. IEEE Trans.Computer-Aided Design, 14(9):1104-1114, 1995.

42

K.P. Traar. VLSICAP 2.0S: A 2D Simulator for Linear and Nonlinear Capacitances. Electrosoft, 1(2):98-115, 1990.

43

W. Tuppa and S. Selberherr. A CASE Oriented Configuration Management Utility. In Proceedings of International Conference on Modelling and Simulation, Pittburgh, Pennsylvania, USA, April 1996.

44

R.F. Wehofer. Flexibler 2-4-Baum basierter Gittergenerator für BAMBI- und Delaunay-Gitter. Diplomarbeit, Technische Universität Wien, 1995.

45

R. Zavodnik and H. Kopp. Graphische Datenverarbeitung. Hanser, München, 1995.