9.3.6 Simulation Results

Figure 9.10 and Figure 9.11 depict the evolution the peak concentrations of the Gaussian profiles N₃, and N₄ and their $\sigma$ values during the inverse modeling procedure. Figure 9.12 depicts the match vector which represents the accuracy of simulated data compared to measured data in percent. It shows the match which resulted from the initial profile, from an intermediate profile, and from the final profile. One can see from this figure that the optimizer was able to identify vertical doping profiles which match the measurements considerably better than the initial profile did. compare the transfer characteristics of the $0.5\mu \textrm {m}$ device at a drain voltage of 1.5V in linear, and logarithmic scale, respectively. One can see that the inverse modeling procedure resulted in a exceptional good fit, given the fact that only the vertical distribution of the acceptor doping was considered and the lateral profile of the donor doping remained unchanged.