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5.1.1 Controlling Simulation Tools

The first item in the tool-flow, which is labeled ligament, contains a call to the ligament program, as can be seen in its command entry. The command line (cmdline) which is used for the execution of LIGAMENT is contained in the cmdline entry of the ligament tool description. As can be seen in Example 5.1, this command line contains the template symbol mask. The value of this symbol will be derived from the simulation-flow-model's input port named mask and defines the mask set which is used by LIGAMENT to produce the simulation description for DIOS.

The controls section of the ligament tool also contains a template labeled recipe which contains the process recipe in LIGAMENT's notation. Example 5.2
\begin{Example}
% latex2html id marker 5312\centering\small
\begin{minipage}{0...
...ed by \textsf{SIESTA}{}'s
\textbf{simu\-la\-ti\-on-flow-model}{}.}
\end{Example}
depicts an excerpt from the file "lig.cmd" defining the recipe template. It contains two template symbols named vt-energy and vt-dose which are referring to input ports of the simulation-flow-model known under the same name. According to Section 3.4, it would be equivalent if they had been named inputs.vt-dose, and inputs.vt-energy. It should be stressed that the physical dimensions (1/cm2 and keV) associated with these symbols are defined in the text of the input deck template. This is necessary since each simulation tool handles dimensions in an individual style using specific conventions. Note how this template, known under the label recipe, is used in the tool's command line by referring to a file named "recipe" in the invocation directory of the tool.


next up previous contents
Next: 5.1.2 Capturing Simulation Results Up: 5.1 Modeling Fabrication Processes Previous: 5.1 Modeling Fabrication Processes
Rudi Strasser
1999-05-27