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5.1 Modeling Fabrication Processes

The simulation-flow-model (Description 3.2) can be utilized to encapsulate process simulation tools. These process simulation tools are inserted into the tool-flow of the simulation-flow-model as shown in Example 5.1. The example demonstrates how the DIOS process simulator and its associated recipe generation tool LIGAMENT can be controlled within a simulation-flow-model.
$\begin{Example} % latex2html id marker 5244\centering\small \begin{minipage}{\... ...e port \textit{mask} defines the mask set used during processing.} \end{Example}$

5.1.1 Controlling Simulation Tools
5.1.2 Capturing Simulation Results
5.1.3 Using Results of Preceding Tools
5.1.4 Lithography Masks
5.1.5 Using Heterogeneous Process Simulation Tools
- 5.1.5.1 Semiconductor Wafer Descriptions

Rudi Strasser
1999-05-27