List of Acronyms

BTRM	Ballistic Transport and Reaction Model
CBCM	Charge Based Capacitance Measurement
CD	Critical Dimensions
CFL	Courant-Friedrichs-Levy
CMOS	Complementary Metal Oxide Semiconductor
CMP	Chemical Mechanical Planarization
CPU	Central Process Unit
CVD	Chemical Vapor Deposition
ECAD	Electronic Computer Aided design
ELSA	Enhanced Level Set Applications
IADF	Ion Angular Distribution Function
IC	Integrated Circuit
ILD	Interlevel Dielectric
IPD	Input Deck Library
LDMOS	Laterally Diffused MOS
LPCVD	Low Pressure Chemical Vapor Deposition
MOS	Metal Oxide Semiconductor
MOSFET	Metal Oxide Semiconductor Field Effect Transistor
PDE	Partial Differential Equation
PECVD	Plasma Enhanced Chemical Vapor Deposition
PIF	Profile Interchange Format
PSLG	Planar Straight Line Graph
PVD	Physical Vapor Deposition
RCX	Resistance and Capacitance Extraction
RESURF	Reduced Surface Field
RF	Radio Frequency
RIE	Reactive Ion Etching
SEM	Scanning Electron Microscope
SOI	Silicon-On-Insulator
SIESTA	Simulation Environment for Semiconductor Technology Analysis
SPICE	Simulation Program with Integrated Circuit Emphasis
TCAD	Technology Computer Aided Design
TMOSFET	Trench MOSFET
TCO	Total Cost of Ownership
TEOS	Tetraethoxysilane, $Si(OC_{2}H_{5})_{4}$
ULSI	Ultra Large Scale Integration
UV	Ultraviolet
WSS	Wafer State Server