List of Symbols

$\beta$, $\beta_0$	sticking coefficients
$D_{ijk}^{+x}$	forward difference in $x$ direction
$D_{ijk}^{-x}$	backward difference in $x$ direction
$D_{ijk}^{+y}$	forward difference in $y$ direction
$D_{ijk}^{-y}$	backward difference in $y$ direction
$D_{ijk}^{+z}$	forward difference in $z$ direction
$D_{ijk}^{-z}$	backward difference in $z$ direction
$F_{c}$	neutral flux on the surface
$F_{d}$	inhibitor flux on the surface
$F_{i}$	ion flux on the surface
$S_{c}^{0}$	clean sticking coefficient for neutral
$S_{d}^{0}$	clean sticking coefficient for inhibitor
$F(t,\mathbf{x})$	speed function
$F_{ext}$	extended speed function
$F_{ijk}$	grid values of the speed function
$I_{N}$	total flux after $N$ reflection
$I_R$	vector of fluxes from reflections
$I_{R,k}$	vector of fluxes from $k$th reflection
$I_S$	vector of fluxes coming from the sources
$I_{S,k}$	vector of fluxes sticked at the $k$th bounce
$J_n$	electron current density
$J_p$	hole current density
$\Omega$	radiosity matrix
$\varphi _{ijk}^n$	grid values of the level set function at time $n$
$V$	electric potential
$\varphi (t,\mathbf{x})$	level set function
$\varphi _{temp}$	temporary signed distance function
$R_{E}$	etching rate
$\theta_{c}$	surface coverage for neutral
$\theta_{d}$	surface coverage for inhibitor
$Y$	etching yield

Alles wissen nur alle, aber alle sind noch nicht geboren.

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