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A simpler method for metal tunnel junctions is the step edge
cut-off process shown in Fig. 5.2. The particular process shown
was proposed by W. Langheinrich and H. Ahmed [74]. A
similar technique is from S. Altmeyer et al. [1].
Figure 5.2:
Step edge cut-off method. A metal line is evaporated over a step
edge.
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A step or groove is formed, over which a metal line is deposited. The
capacitance of this tunnel junctions are small compared to the junctions
produced by the shadow mask technique, since there is no overlap of the
electrodes at all. This process is especially suitable for material
systems with lower barrier heights than Al/Al2O3(about 2 eV), such as Pb/Cr2O3 (0.02 eV) and
Cr/Cr2O3 (0.06 eV). The lower barrier height allows
a larger distance, about 10 nm compared to 1 nm, between the electrodes by
equal barrier strength. This results in a further reduced tunnel junction
capacitance and larger process tolerances.
Christoph Wasshuber