4. Process Simulation Applications

In the following sections applications of the WAFER-STATE-SERVER are given. The three three-dimensional process simulators -- Monte-Carlo Ion Implantation simulator (MCIMPL), diffusion and oxidation simulator (FEDOS), and the etching and deposition simulator (ETCH3D) are presented. These simulators are fully integrated with the WAFER-STATE-SERVER and take advantage of the described functionality.

Subsections

• 4.1 MCIMPL-- Three-Dimensional Monte-Carlo Ion Implantation Simulator
  • 4.1.1 Implementation Details
  • 4.1.2 Examples
  
  
• 4.2 FEDOS -- Three-Dimensional Finite-Element Diffusion and Oxidation Simulator
  • 4.2.1 Implementation Details
    • 4.2.1.1 Mesh Refinement
    • 4.2.1.2 A Posteriori Mesh Refinement
  • 4.2.2 Examples
  
  
• 4.3 ETCH3D -- Topography Simulator
  • 4.3.1 Implementation Details
    • 4.3.1.1 Post Processing
  • 4.3.2 Examples

2003-03-27