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2.1.
Important properties of SiO
(silicon dioxide).
2.2.
Rate constants describing (111) oriented silicon oxidation kinetics at 1atm pressure. For the corresponding values for (100) oriented silicon,
values should be divided by 1.68.
2.3.
Rate constants describing oxidation kinetics at 1atm pressure using the Massoud model for various silicon orientations and temperatures from [
143
].
2.4.
Arrhenius expressions for pre-exponential constants
and
, time constants
and
, and activation energies
,
,
, and
from the Massoud model presented in [
143
] and given in (
2.40
)-(
2.44
).
3.1.
Effects of wire orientation on the nanowire height and width, with
=0.1ms,
=7V, and
=55%.
4.1.
Characteristics of atomizers commonly used for spray pyrolysis.
6.1.
Characteristics of the precursor solutions used for the simulations.
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L. Filipovic: Topography Simulation of Novel Processing Techniques