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5.1 Spray Pyrolysis Deposition
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Dissertation L. Filipovic
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4.2.3 Etching of Silicon
5.
Simulating Deposition and Etch Processes
Subsections
5.1
Spray Pyrolysis Deposition Modeling
5.1.1
Modeling Droplet Atomization
5.1.2
Modeling Droplet Transport
5.1.2.1
Droplet transport using gravity and Stokes forces
5.1.2.2
Droplet transport inside the heat zone
5.1.2.3
Droplet transport including the electrical force
5.1.3
Modeling Interaction between Droplet and Wafer Surface
5.1.3.1
Deposition Model
5.2
Modeling BiCS Memory Hole Etching
5.2.1
Carbon Fluorides for Silicon Dioxide Etching
5.2.2
Halogen Gas for Silicon Etching
Next:
5.1 Spray Pyrolysis Deposition
Up:
Dissertation L. Filipovic
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4.2.3 Etching of Silicon
L. Filipovic: Topography Simulation of Novel Processing Techniques
