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Charge Trapping and Single-Defect Extraction in Gallium-Nitride Based MIS-HEMTs

Acronyms

2DEG two-dimensional electron gas

ADC analog-digital converter

AFM atomic force microscopy

Al aluminium

AlGaN aluminium gallium nitride

AlInN aluminium indium nitride

AlN aluminium nitride

arPLS asymetrically reweighted penalized least-squares

BFoM Baliga’s figure of merit

BTI bias temperature instability

C carbon

CC configuration coordinate

CDF cumulative distribution function

CET capture emission time

DD drift-diffusion

DFT density functional theory

DG density gradient

DLTS deep level transient spectroscopy

EDMR electrically detected magnetic resonance

EM expectation maximization

EMF electromotive force

eMSM extended measure-stress-measure

ESR electron spin resonance

Fe iron

FET field-effect transistor

Ga gallium

GaAs gallium arsenide

GaN gallium nitride

H hydrogen

HCD hot-carrier degradation

HEMT high-electron-mobility transistor

HFET heterojunction field-effect transistor

HMM Hidden Markov Model

IGBT insulated gate bipolar transistor

In indium

InGaN indium gallium nitride

InN indium nitride

JFET junction field-effect transistor

JFoM Johnson’s figure of merit

LED light emitting diode

LOWESS locally weighted scatterplot smoothing

MAP maximum a-posteriori

Mg magnesium

MIS-HEMT metal-insulator-semiconductor HEMT

MOS metal-oxide-semiconductor

MoS2 molybdenum disulfide

MOSFET metal-oxide-semiconductor field-effect transistor

MSM measure-stress-measure

N nitrogen

NBTI negative bias temperature instability

NMP non-radiative multi-phonon

O oxygen

OTF on-the-fly

PBTI positive bias temperature instability

PDF probability density function

RMS root mean square

RTN random telegraph noise

Si silicon

SiC silicon carbide

SiGe silicon germanium

SILC stress induced leakage current

SiN silicon nitride

SiO2 silicon dioxide

SNR signal to noise ratio

STM scanning tunneling microscopy

TAT trap-assisted tunneling

TCAD technological computer aided design

TDDS time-dependent defect spectroscopy

TEM transmission electron microscopy

TMI TDDS measurement instrument

UID unintentionally doped

(math image) threshold voltage

WKB Wentzel–Kramers–Brillouin