4.4.3 Electronic Stopping Process

The electronic stopping process is modeled according to the empirical stopping model suggested in Sec. 3.3.3. The only physical parameter required for this model is the impact parameter which is determined when selecting a collision partner (Sec. 4.4.1). An individual set of empirical parameters $k_{corr}$, $a_{U}$, $y_{nl}$ and $q$ is applied for each particle species (Tab. 4.1). For $c$ a constant value of 1 is used for all particle species as suggested in [73].

Table 4.1: Empirical parameters for the electronic stopping model.

Ion species	$k_{corr}$	$a_{U}$	$y_{nl}$	$q$
Boron	1.750	0.450	0.050	0.230
Nitrogen	1.6861	0.436	0.318	0.110
Fluorine	1.6119	0.607	0.000	0.000
Phosphorus	1.267	0.421	0.025	0.145
Arsenic	1.132	0.306	0.024	0.299
Indium	1.100	0.300	0.500	0.000
Antimony	1.100	0.300	0.500	0.000

Due to the fact that the electronic stopping model implies a dependence on the charge and the mass of the atoms of the target material the electronic stopping power is averaged in case of materials consisting of more than one atom species. The contribution of each atom species is considered according to the stoichiometry of the material.

Additionally a special treatment is applied for multiple collisions. While the local part of the electronic stopping model is calculated just once, the non-local contribution to the electronic stopping model is calculated once for each collision.

Footnotes

... parameters

The empirical parameters are stored in the file mcimpl_data.dat (located in $CWD, $VPROJECT, $VROOT).