1.3 Thesis Overview



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1.3 Thesis Overview

The first part of the thesis presents the mathematical and software foundations of the task module development and integration in VISTA. In the next chapter the mathematical basis of the numerical tasks and their algorithmic implementation are presented. Special consideration is given to their characteristics when applied in a TCAD environment. In Chapter 3, the software implementation aspects are discussed including the issues related to the integration of the task module into the VISTA framework. An object oriented representation is proposed in which so-called Model Objects (MO) form the basis of the interface between the task code and the framework facilities.

Typical characterization applications are presented in the second part of this thesis. The selected examples cover the whole range of technology characterization normally encountered in a manufacturing environment. They include:

These applications highlight the important role TCAD tasks can play in submicron technology development and characterization. Finally, suggestions for future extensions of the present work are given as a conclusion in the final chapter.



Martin Stiftinger
Tue Aug 1 19:07:20 MET DST 1995