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After finalization of the behavioural modeling of the schematic, the design is
layed out into a complex combination of masks. There are several basic building
blocks of the layout. The digital library consists of predefined highly
optimized (in terms of speed and area) digital cells which are connected
automatically by metal interconnect layers during place and route.
Memory blocks (SRAM, DRAM, OTP or NVM) are normally placed by memory
generators automatically. The most demanding building block for a designer is the
analog part of a design, where linearity, accuracy, and matching of the single
devices play an important role. Especially the layout of this block may have an
important influence on the subsequent performance of the analog part of the
design by introducing additional parasitics between the single devices in the
silicon (e.g. leakage). High frequency or timing dependent applications can be
strongly influenced by the RLC-network of the interconnects between the analog
components. Therefore, after layout a parasitic extraction has to
be performed, where the RLC-network of the interconnects is extracted from the
layout and this extracted values are put into the overall
schematic of the integrated circuit in an additional circuit simulation run.
Finally the bonding pads are placed to provide the ports of the design, where
the package bond wires are connected to. There are several different pad
types:
- Digital I/O pads: These pads are optimized for the connection to and from
the digital logic. The operating voltages range from 5V down to 1.3V for low
power logic.
- Analog I/O pads: These pads take special measures to provide different
voltage levels depending on the process technology [29] (e.g. for high voltage
drivers analog outputs have to support higher voltages than 5V).
- VDD and VSS pads: These pads are for the supply of the chip.
The main difference of the above types is in their ESD (electrostatic
discharge) protection concept. Because the devices connected to the pad types
are very different (digital cells, drivers or power buses), the ESD
protection concept has to account for this independently. A special subset of
the Analog I/O pads is frequently termed as RF pad which provides a reduced amount of
interconnect parasitics for critical analog high frequency applications.
After finalization of the layout the integrated circuit may be clustered
together with other circuits, if multiple products are processed together in
one batch in an MPW (multi product wafer batch). For high volume products a
SDT (single die tooling) is prefered, where only one product is processed in a
wafer batch. The tape out marks the transfer of the layout data to the
mask shop for generation of the lithography masks for processing. The data can
be transferred in different formats like CIF, GDSII, EBES, or EDIF which are
described in more detail in Appendix B.
Next: 2.4 Mask Generation
Up: 2. The Processing Chain
Previous: 2.2 Design
R. Minixhofer: Integrating Technology Simulation
into the Semiconductor Manufacturing Environment