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2.8 Packaging

The role of packaging in semiconductor electronic applications is to protect and preserve the performance of the semiconductor device from electrical, mechanical, and chemical corruption or impairment. This role is becoming more and more important as well as difficult to execute as device performance, complexity, and functionality increase with each succeeding generation of technology.
The design of the package has a significant effect on the electrical behavior of an integrated circuit. The electrical representation of the package can be described in terms of a number of formats including resistance, inductance, and capacitance (RLC) [66]. A number of software tools are available to generate this RLC data and map it into a format for circuit simulation programs [67], [68].There are many programs, both commercial and university based, available for electrical modeling of packages and interconnects. Furthermore, the thermo-mechanical behavior of packages is getting more and more important. The change to area-array interconnect with high I/O counts and power dissipation has made thermal deformation an important concern for package reliability. In addition in smart power applications the self-heating of the big high-voltage output drivers can cause severe problems in the thermal design of the overall IC / Package / Environment system. Finally for high frequency applications in the GHz range, the RF/Mixed signal package modeling has to be carried out to predict the RF behavior of the overall system more accurately. In this application fields a careful design of the package by using simulation is mandatory. Since package modeling is a very complex issue for its own, and it is not scope of this work more detailed information may be found in, e.g., [69].


next up previous contents
Next: 3. The TCAD Concept Up: 2. The Processing Chain Previous: 2.7 Sort and Final

R. Minixhofer: Integrating Technology Simulation into the Semiconductor Manufacturing Environment