At each step entry, all available output can be directly accessed and
displayed in accordance with its data type. For example, Figure
6.7 shows the available choices after a MINIMOS step.
The highlighted selection DATA DRAINCURRENT 1.18E-11 ... identifies
a series of drain current values of a NMOS transistor
calculated by MINIMOS. On selecting
this entry, a plotting tool
is activated to display a graph of the the drain current values. Figure
6.8 shows the interactive plotting tool
xpif1d
displaying the set of drain current values generated by the MINIMOS
step.
For wafer data that is stored in the PIF format, not only the
PIF file, but also the different data sets contained in the file
are directly accessible.
In this manner, at a simple glance one can check, e.g., what kind of dopants are present at a given position of a run, and invoke the xpif2d visualization program for further examination of the dopant distribution in the wafer.
Figure 6.7:
Output data selection dialog. Direct access is provided to all
data generated by a step. The data type determines the viewer that
is used for displaying the data item selected.
Figure 6.8:
Xpif1d is one of a number of available
plotting tools for viewing one-dimensional data sets.