The other modeling parameters are given in Table 4.3-4, where
the grain growth parameter are taken from [Kal90]. All parameters are
modeled by Arrhenius laws , if applicable. The
clustering parameters are obtained from Table 4.3-1.
Polysilicon Diffusion Parameters | |||||
P | ![]() | ![]() | |||
![]() | 1200.0 | ![]() | ![]() | ||
| ![]() | 1200.0 | ![]() | ![]() | |
Arsenic | ![]() | 0.066 | ![]() | ![]() | |
| ![]() | 12.0 | ![]() | ![]() | |
Trapping Factor | t | ![]() | ![]() | ![]() | |
Emission Factor | e | ![]() | ![]() | ![]() | |
Max. Grain Boundary Area | ![]() | ![]() | ![]() | ||
Grain Boundary Thickness | ![]() | 5 | nm | ||
Grain Boundary Energy lat. | ![]() | 0.25 | eV | ||
Grain Boundary Energy vert. | ![]() | 0.25 | eV | ||
Stress Scaling Factor | ![]() | 150 | MPa |