Electromigration data have been described by lognormal distributions.
Although the origin of the lognormal distribution of electromigration
lifetimes is not entirely clear, it has been argued that the diffusion
process in connection with the effect of microstructure on
electromigration provides the basis for the lognormal distribution. In
copper dual-damascene interconnects the main diffusivity path is along
the copper/capping layer interface. This interfacial diffusion is
affected by the orientation of the grains. As the copper grain sizes
seem to follow lognormal distributions in typical dual-damascene process
technology and due to the influence of microstructure on the
electromigration process, the lognormal distribution has been used as
the underlying statistics for electromigration lifetimes. However, it
has been discussed whether this choice is the most appropriate. The
understanding of the electromigration lifetime distribution is crucial
for the extrapolation of the times to failure obtained empirically from
accelerated tests to real operating conditions, as performed by a
modified form of the Black equation. Moreover, it has been shown that
the microstructure plays a key role regarding the failure mechanisms in
copper dual-damascene interconnects. It affects electromigration in
different ways. Grain boundaries are natural locations of atomic flux
divergence, they act as fast diffusivity paths for vacancy diffusion,
and they act as sites of annihilation and production of vacancies.
We have investigated the effect of the microstructure and the origin of
the statistical distribution of electromigration times to failure as a
function of the distribution of copper grain sizes. The effect of
lognormal grain size distributions on the distribution of
electromigration lifetimes of fully three-dimensional copper
dual-damascene interconnect structures is studied based on numerical
simulations. We have applied a continuum multi-physics electromigration
model that incorporates the effects of grain boundaries for stress
build-up. Moreover, we have developed a tool to include the
microstructure into the simulations based on a given statistical
distribution of grains sizes.
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