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1.1 Traditional Semiconductor Process
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Dissertation L. Filipovic
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List of Symbols
1.
Introduction
Subsections
1.1
Traditional Semiconductor Process Technologies
1.1.1
Lithography
1.1.2
Etching
1.1.3
Deposition
1.1.4
Chemical Mechanical Planarization
1.1.5
Oxidation
1.1.6
Ion Implantation
1.1.7
Diffusion
1.2
Approaches to Semiconductor Modeling
1.2.1
Atomistic Approach
1.2.2
Continuum Approach
1.3
Motivation for Novel Processing Techniques
1.4
Simulator Implementation
1.4.1
Fast Level Set Framework
1.4.1.1
Sparse Field Method
1.4.1.2
H-RLE Data Structure
1.4.1.3
Multiple Material Regions
1.4.2
Surface Rate Calculation
1.4.2.1
Transport Kinetics
1.4.2.2
Surface Kinetics
1.5
Outline of the Thesis
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1.1 Traditional Semiconductor Process
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Dissertation L. Filipovic
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L. Filipovic: Topography Simulation of Novel Processing Techniques
