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6.3 Logarithmic Stress Behavior

In order to understand the microscopic physics behind the short-time degradation, the temperature, voltage, and oxide-thickness dependence of the prefactor B of (6.1) is investigated. Therefore, a large dataset of stress measurements is collected and analyzed.

  6.3.1 Used Samples and Stress Conditions
  6.3.2 Temperature Scaling
  6.3.3 Voltage Scaling
  6.3.4 Oxide Thickness Scaling
  6.3.5 Extracted Prefactors

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