The applications of this chapter are additional examples of the important role of TCAD framework tasks in technology characterization. In particular, the capability of the tasks to combine the numerical and physical modeling features of TCAD device and process simulation, and the speed of execution of polynomial response surface models provide invaluable tools in technology development. This meta-simulation capability has the potential to contribute significantly in developing customized and flexible processes and to acheive a closer integration of the manufacturing and circuit design activities.