3.5 Global Perspective

We presented how layout information is handled by the VISTA TCAD framework. It integrates a small layout editor, a lithography analysis module, contact and netname support, interface with one, two and three-dimensional process simulators and a tool for generation of parameterized layout sets. A global perspective of the tools is presented in Figure 3.15.

Figure 3.15: Layout data in VISTA - Block diagram.