For simulators to accurately predict the results of fabrication
process steps as well as the device behavior, calibration is of utmost
importance.
By adjusting certain calibration
parameters
,
the computed results can be made to agree with measured data over a
certain range of variation in the process parameters and operation
conditions.
In general, the more accurate the result has to be, the
smaller is the valid range of a calibration.
Only calibrations and uncalibrated model together form a valid model
for a given application. Depending on the level of detail that is of
interest as well as on the data available,
calibration can either be performed locally on the tool level or
globally for the complete process.