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3.1 Solid Modeling
In the following, the available solid modeling operations are
introduced. The aim of this section is to demonstrate the possibilities for the
geometry generation and to give a hint on the complexity of achievable geometry
modifications. Special sections are devoted to the definition of the
simulation domain (Section 3.1.1), to the application of
masks (Section 3.1.2), to a so called filling
operation (Section 3.1.3), to chemical mechanical
planarization (Section 3.1.4), to stripping of
materials (Section 3.1.5), and to oxidation forming ``bird's
peaks'' (Section 3.1.6).
Subsections
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Up: 3. Solid Modeling and
Next: 3.1.1 Defining a Simulation
W. Pyka: Feature Scale Modeling for Etching and
Deposition Processes in Semiconductor Manufacturing