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To identify the relevant doping regions of the devices a sensitivity analysis
is carried out. This procedure is explained in detail in Section 4.4.2.
The results for Device Generation A are shown in Fig. 6.13 and
Fig. 6.14, and for Device Generation B in Fig. 6.15 and
Fig. 6.16. It can be seen that the gate delay time and leakage
current sensitivities are almost identical. The most important region is once
again the doping peak in the channel.
Figure 6.13:
The gate delay time (top) and leakage current (bottom) sensitivities
for the NMOS, Device Generation A.
|
Figure 6.14:
The gate delay time (top) and leakage current (bottom) sensitivities
for the PMOS, Device Generation A.
|
Figure 6.15:
The gate delay time (top) and leakage current (bottom) sensitivities
for the NMOS, Device Generation B.
|
Figure 6.16:
The gate delay time (top) and leakage current (bottom) sensitivities
for the PMOS, Device Generation B.
|
Next: 6.4.3 Analytical Profiles
Up: 6.4 Optimization Process
Previous: 6.4.1 Two-Dimensional Optimization
Michael Stockinger
2000-01-05