``A little inaccuracy sometimes saves tons of explanation.''
Hector Hugh Munro5.1
THIS chapter presents typical applications for optimization in
TCAD. Since the field of TCAD includes a wide range of applications, this
chapter will present a subset of optimization to show the difficulties of these
examples and their solutions. The first part of this chapter presents the
calibration of certain model for deposition of
using a LPCVD
process. The second part deals with the extraction of thermal coefficient for
the electrical and thermal conductivity. The third part presents some examples
where the information obtain from the first two examples are applied in order to
provide accurate material models for more advanced structures.