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Nomenclature
2D |
Two-Dimensional |
3D |
Three-Dimensional |
CMOS |
Complementary Metal-Oxide-Semiconductor |
CVD |
Chemical Vapor Deposition |
DRIE |
Deep Reactive Ion Etch |
EM |
Electromigration |
FEDOS |
Finite Element Diffusion and Oxidation Simulator |
FEM |
Finite Element Method |
GB |
Grain Boundary |
IC |
Integrated Circuit |
ILD |
Inter-Level Dielectric |
IVD |
Inter-Via Dielectric |
KKR |
Korringa-Kohn-Rostoker |
LKKR |
Layer KKR |
PDE |
Partial Differential Equations |
PECVD |
Plasma Enhanced CVD |
TCAD |
Technology Computer Aided Design |
TSV |
Through Silicon Via |
TTF |
Time to Failure |
UV |
Ultraviolet |
![\( A \)](lateximages/00E0A8BFF0D9D10D098B56840BF41AD7.svg) |
Area |
![\( B \)](lateximages/8BA9A143A2FF90046F9C6A4F34206A82.svg) |
Applicable Mechanical Modulus |
![\( C_{\mathrm {a}} \)](lateximages/FEF3874CA2DC7C4CE16046C6E06B43D8.svg) |
Atom Concentration |
![\( c_{\mathrm {T}} \)](lateximages/44A28EF294E45426BF1217BCBD8174D8.svg) |
Specific Heat Capacity |
![\( C_{\mathrm {v}} \)](lateximages/5300A23465E76B1320E56EB4EE560389.svg) |
Vacancy Concentration |
![\( C_{\mathrm {v}}^{\mathrm {e}\mathrm {q}} \)](lateximages/22E6F8BBCFAAC901227FBA15DE0075B3.svg) |
Equilibrium Vacancy Concentration |
![\( d \)](lateximages/56806C718CCE321EFBB74CAD58F291BA.svg) |
Grain Size |
![\( D_{\mathrm {a}} \)](lateximages/19446AB3C91EF06C2D2C8044A10F1FF5.svg) |
Atom Diffusion Coefficient |
![\( D_{\mathrm {e}\mathrm {f}\mathrm {f}} \)](lateximages/CEAFA844C112E2376594ADA5FC7CE72B.svg) |
Effective Diffusion Coefficient |
![\( D_{\mathrm {G}\mathrm {B}} \)](lateximages/96B04932A15483597CEB19889C7565F8.svg) |
Grain Boundary Diffusion Coefficient |
![\( D_{\mathrm {s}} \)](lateximages/F3F2C703FCB6E319B58941B6DBB53A7D.svg) |
Surface Diffusion Coefficient |
![\( D_{\mathrm {v}} \)](lateximages/228502589BBC94651AE0C556E6440609.svg) |
Vacancy Diffusion Coefficient |
![\( E \)](lateximages/1CB4F552BDA2349324C92AB4F171916F.svg) |
Electric Field |
![\( e \)](lateximages/F74069FB08A771D519A7AA1E8FAA619D.svg) |
Unit Charge |
![\( E_{a} \)](lateximages/565F2262D23858CF2D51CF185A5F4299.svg) |
Activation Energy |
![\( F \)](lateximages/15E8FCAAB6495CB9B6890168B00A368A.svg) |
Mechanical Force |
![\( f \)](lateximages/1F7C2DDC95F64F736D1D20A8B93F0BA9.svg) |
Relaxation Factor |
![\( j \)](lateximages/78735E8029DA716D9A341E483652A922.svg) |
Current Density |
![\( J_{\mathrm {a}} \)](lateximages/562F63187C561D9363038B1E82EFBD09.svg) |
Atom Flux |
![\( J_{\mathrm {v}} \)](lateximages/EF4E86D541DE76C45850388663EEF0D1.svg) |
Vacancy Flux |
![\( k_{\mathrm {B}} \)](lateximages/CBC7E6C149AFC326D1E00DEFCE122644.svg) |
Boltzmann Constant |
![\( Q^{*} \)](lateximages/FEC73ECBBBF741EF13E4E351505DFDC8.svg) |
Heat of Transport |
![\( \dot {q} \)](lateximages/6D2A2A20CB541E716FC2D861BE834544.svg) |
Joule Heat Generated per Time |
![\( R_{\mathrm {p}} \)](lateximages/5D7D629A751551D5D2D6C9B8F4337658.svg) |
Flaw Radius |
![\( T \)](lateximages/AA48CD94AA5FB5C483512013649D24F2.svg) |
Temperature |
![\( T_{\mathrm {r}\mathrm {e}\mathrm {f}} \)](lateximages/DEAF4873B199B00DD180B79EA6B6038E.svg) |
Reference Temperature |
![\( \mathrm {u} \)](lateximages/076CA0F4E95EAAFC8C8D4EAA711BDBB3.svg) |
Displacement Field |
![\( V \)](lateximages/CB5C0916B003C13FD6DAF6874DBA9FF5.svg) |
Volume |
![\( W \)](lateximages/1D8DD4AEB0CE95A0C7D8B98F9D695AD7.svg) |
Elastic Strain Energy |
![\( Z^{*} \)](lateximages/20506D120DEFDADBAF345C6D8C374A29.svg) |
Effective Valence |
C |
Elastic Tensor |
![\( \delta \)](lateximages/D2F7B97FE6290629AA9EEF88E7CAE992.svg) |
Grain Boundary Width |
![\( \delta _{i,j} \)](lateximages/23293F8EA5270273B649DA36BACF547D.svg) |
Kronecker Delta |
![\( \epsilon \)](lateximages/6F59BD535D901E44C118996497A198C4.svg) |
Mechanical Strain |
![\( \epsilon _{\mathrm {p}\mathrm {f}} \)](lateximages/D3AFF0240DC1DB62122186CBCD5E5987.svg) |
Phase Field Interface Thickness Parameter |
![\( \epsilon _{\mathrm {T}} \)](lateximages/EBDA2AAC74E5712DC50513A980DB0345.svg) |
Temperature Induced Mechanical Strain |
![\( \epsilon _{\mathrm {v}} \)](lateximages/94C39EC1CC44F9778D5AF33EAC37474E.svg) |
Vacancy Related Mechanical Strain |
![\( \phi _{\mathrm {E}} \)](lateximages/6E3C92124EE3A25FFD73E8341E9AC542.svg) |
Electric Potential |
![\( \gamma _{\mathrm {S}} \)](lateximages/9A2DA76C9F41CADBA1D79D8E3B8A5771.svg) |
Surface Energy |
![\( \kappa \)](lateximages/5F9DA199185B33F003270DAF285C7969.svg) |
Surface Curvature |
![\( \lambda \)](lateximages/97FE645894C4DA54420A16B9ADDC663B.svg) |
Lamè Parameter |
![\( \lambda _{\mathrm {T}} \)](lateximages/5C5A413248EDBC2EFD52FFE4F8EABA2E.svg) |
Thermal Conductivity |
![\( \mu \)](lateximages/24C6AD8D515E1D6D413DBEF51FA4B91B.svg) |
Chemical Potential |
![\( \rho \)](lateximages/6048AB006A209E2B0C8330A367F956BF.svg) |
Specific Electric Resistance |
![\( \rho _{\mathrm {M}} \)](lateximages/7DCA5D37564D7F7E6CB5EF45233E04C7.svg) |
Material Density |
![\( \sigma \)](lateximages/F9A586BE198AFFC18762307BCD99DAA0.svg) |
Isotropic Stress |
![\( \sigma _{\mathrm {E}} \)](lateximages/922CFF3F3C22F37C71063FB8E7D86FE4.svg) |
Electric Conductivity |
![\( \sigma _{\mathrm {t}\mathrm {h}} \)](lateximages/93EAC34BB7837550FFE60B33861B9943.svg) |
Threshold Stress for Void Nucleation |
![\( \tau \)](lateximages/21CE72DCDE0AAD274BE864EACAFD9FC2.svg) |
Characteristic Relaxation Time |
![\( \Omega \)](lateximages/F707B8CE2A90511964174A9A36F9D4F8.svg) |
Atomic Volume |
List of Figures
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