D i s s e r t a t i o n
Charge Transport Models
for Reliability Engineering of
Semiconductor Devices
ausgeführt zum Zwecke der Erlangung des akademischen Grades
eines Doktors der technischen Wissenschaften
eingereicht an der Technischen Universität Wien
Fakultät für Elektrotechnik und Informationstechnik
von
MARKUS BINA
Lesehofstrasse 2
A-3500 Krems an der Donau, Österreich
Matrikelnummer 0525249
geboren am 25. September 1985 in St. Pölten

Wien, im März 2014      

Zusammenfassung
Abstract
Acknowledgement
Contents
1  Introduction
2  Charge Carrier Transport
 2.1  Band structure
 2.2  The Boltzmann Transport Equation
 2.3  The Method of Moments
 2.4  The Monte Carlo Method
 2.5  The Spherical Harmonics Expansion Method
 2.6  Quantum Mechanical Effects - Confinement
 2.7  Non-Equilibrium Greens Functions Approach
3  Spherical Harmonics Expansion
 3.1  Theory
 3.2  The H-Transform
 3.3  Discretization
 3.4  Full-band Effects
 3.5  Recombination and Generation
 3.6  Time-dependent SHE of the BTE
4  Quantum Correction Methods
 4.1  The Density Gradient Model
 4.2  The First-Order Quantum Corrected Drift Diffusion Model
 4.3  The First-Oder Quantum Corrected SHE of the BTE
 4.4  Discretization
 4.5  Boundary Conditions
 4.6  Calibration
5  Variability
 5.1  Random Discrete Dopands
 5.2  Random Discrete Traps
 5.3  Random Discrete Doping and a SHE of the BTE
6  Bias Temperature Instability
 6.1  Measurement Techniques
 6.2  Models for the Bias Temperature Instability
 6.3  Implementation and Requirements
 6.4  Model Evaluation on pMOSFETs using the Direct Current Current Voltage Method
 6.5  Results on Trap-Assisted Tunneling
7  Hot Carrier Degradation
 7.1  Measurement Technique
 7.2  Electric Field Dependence
 7.3  Temperature Dependence
 7.4  Channel Length Dependence
 7.5  Models
 7.6  Requirements for Simulation
 7.7  Calibration
8  Conclusions
9  Outlook
Bibliography
Own Publications
Curriculum Vitae
You live and learn.
At any rate, you live. (Douglas Adams) Der Andersdenkende ist kein Idiot, er hat sich eben eine andere Wirklichkeit konstruiert. (Paul Watzlawick) It’s my experience that in modelling tradeoffs ‘pain’ is conserved. (Tibor Grasser)

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