The following table contains information about the different hardware used in this PhD thesis.
Wafer ID | Oxide | Poly | Type | Process | Comment | |
SM5P/30/H1 | 30 |
SiO |
n |
PMOS | SNIT/PM | high H |
SM5N/30/H1 | 30 |
SiO |
n |
NMOS | SNIT/PM | high H |
SM5P/30/H2 | 30 |
SiO |
n |
PMOS | Standard | med H |
SM5P/30/H3 | 30 |
SiO |
n |
PMOS | Metal 1 | low H |
SM6P/30/STD1 | 30 |
SiO |
n |
PMOS | Standard | med H |
SM6P/30/STD2 | 30 |
SiO |
n |
PMOS | Standard | med H |
SM6P/30/H1 | 30 |
SiO |
n |
PMOS | thin Ti/PM1 | high H |
SM6P/30/H2 | 30 |
SiO |
n |
PMOS | thin Ti/PM2 | high H |
SM6P/30/H3 | 30 |
SiO |
n |
PMOS | thick Ti/PM1 | low H |
HK2P/1.5/1 | 1.5 |
high– |
p |
PMOS | imec wafer | |